Substrate etching method and system using the sheet vibration,申请号KR20090082807-传众专利搜索

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发明名称	Substrate etching method and system using the sheet vibration
摘要
申请公布号	KR101085628(B1)	申请公布日期	2011.11.22
申请号	KR20090082807	申请日期	2009.09.03
申请人		发明人
分类号	H01L21/3063	主分类号	H01L21/3063
代理机构		代理人
主权项
地址

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