| 摘要 |
Monobutyltinchloride (“MBTC”) is recovered from an effluent vapor stream of a chemical vapor deposition coating process practiced to deposit a fluorine doped tin oxide layer over a glass ribbon. The vapor stream is condensed to a temperature to increase the ratio of MBTC to water in the liquid condensate. The condensed liquid is stored in a phase separation tank to separate the condensed liquid into at least two layers. The layers are individually removed from the phase separation tank, and the layer from the phase separation tank having a density equal to or greater than 80% the density of MBTC is further processed through a vacuum distilling operation to provide MBTC of an acceptable quality to use in the recovered MBTC in the coating process. The recovered MBTC is added to the coating precursors of the chemical deposition process. |
