A METHOD OF FABRICATION OF LEAD ZIRCONATE TITANATE (PZT) THIN FILM MICROWAVE CAPACITOR

摘要

A PROCESS OF FABRICATING LEAD ZIRCONATE TITANATE (PZT) THIN FILM ON A SEMI-CONDUCTOR COMPRISES THE STEPS OF COATING THE PZT THIN FILM ON A SUBSTRATE; COATING A LAYER OF RESIST ON TOP OF THE PZT THIN FILM TO FORM A SAMPLE; SOFT BAKING THE SAMPLE; PATTERNING THE SAMPLE THROUGH A ELECTRON BEAM LITHOGRAPHY APPROACH; DEVELOPING THE SAMPLE IN A DEVELOPER; HARD BAKING THE DEVELOPED SAMPLE; WET ETCHING THE DEVELOPED SAMPLE USING A CHEMICAL SOLUTION; AND CLEANING THE ETCHED SAMPLE TO ACQUIRE THE FABRICATED PZT THIN FILM CHARACTERIZED IN THAT THE RESIST IS POLYMETHYL METHACRYLATE AND THE CHEMICAL SOLUTION IS A MIXTURE OF HYDROFLUORIC ACID, HYDROCHLORIC ACID, AMMONIA SALT AND WATER IN A RATIO OF 0.5 TO 1.5: 5 TO 12: 15 TO 25: 15 TO 60.