发明名称 |
System and method of aligning a sample |
摘要 |
A system and method of use thereof that enables determining and setting sample alignment based on the location of, and geometric attributes of a monitored image formed by reflection of an electromagnetic beam from a sample and into an image monitor, which beam is directed to be incident onto the sample along a locus which is substantially normal to the surface of the sample. |
申请公布号 |
US8064055(B2) |
申请公布日期 |
2011.11.22 |
申请号 |
US20090378400 |
申请日期 |
2009.02.13 |
申请人 |
LIPHARDT MARTIN H.;JOHS BLAINE D.;J.A. WOOLLAM CO., INC. |
发明人 |
LIPHARDT MARTIN H.;JOHS BLAINE D. |
分类号 |
G01J4/00 |
主分类号 |
G01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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