发明名称 |
Supporting device, optical apparatus, exposure apparatus, and device manufacturing method |
摘要 |
The present invention provides a supporting device that supports an optical element, comprising: a first supporting member that is fixed to an outer circumference of the optical element; a plurality of members that is connected to an outer circumference of the first supporting member; and a second supporting member that supports the first supporting member via the plurality of members, wherein each of the plurality of members is configured such that the a rigidity thereof in a first direction inclined relative to a direction orthogonal to an optical axis of the optical element in a plane including the optical axis is lower than a rigidity thereof in each of two directions that are orthogonal to the first direction and that are orthogonal to each other. |
申请公布号 |
US8064152(B2) |
申请公布日期 |
2011.11.22 |
申请号 |
US20100876921 |
申请日期 |
2010.09.07 |
申请人 |
SUDOH YUJI;CANON KABUSHIKI KAISHA |
发明人 |
SUDOH YUJI |
分类号 |
G02B7/02 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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