发明名称 METHOD AND APPARATUS FOR FABRICATING AN ABSORBER OF A SOLAR CELL USING SELENIZATION PROCESS IN THE ELEMENT SELENUIM ATMOSPHERE
摘要 <p>PURPOSE: A method for manufacturing a light absorbing layer of a solar cell by a selenization process under an element selenium vapor atmosphere and a thermal processor for manufacturing the light absorbing layer are provided to reduce the production costs of a CIGS light absorbing layer. CONSTITUTION: The outer wall of a sealed chamber is heated at a preset thin film forming temperature(S300). A sample and a specimen including an element selenium are mounted on a susceptor at room temperature. The susceptor with the sample and the specimen is loaded on the heated chamber(S310). The specimen is rapidly heated by driving a heat source under the susceptor. The element selenium is rapidly heated by driving the heat source located on the susceptor(S320).</p>
申请公布号 KR101085980(B1) 申请公布日期 2011.11.22
申请号 KR20110052459 申请日期 2011.05.31
申请人 SEMICS INC. 发明人 SONG, SEONG HOON
分类号 H01L31/18;H01L31/042 主分类号 H01L31/18
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