发明名称 |
Method for testing a slurry used to form a semiconductor device |
摘要 |
A method for forming a semiconductor device, the method includes providing a semiconductor substrate, applying a slurry to the semiconductor substrate, wherein the slurry was tested using a testing method includes taking a first undiluted sample from a top of the slurry; determining a first particle size distribution characteristic of the first undiluted sample; taking a second undiluted sample from a bottom of the slurry; determining a second particle size distribution characteristic of the second undiluted sample; and comparing a difference between the first particle size distribution characteristic and the second particle size distribution characteristics with a first predetermined value. |
申请公布号 |
US8061185(B2) |
申请公布日期 |
2011.11.22 |
申请号 |
US20080091693 |
申请日期 |
2008.04.25 |
申请人 |
MONNOYER PHILIPPE;FARKAS JANOS;SEBAAI FARID;FREESCALE SEMICONDUCTOR, INC. |
发明人 |
MONNOYER PHILIPPE;FARKAS JANOS;SEBAAI FARID |
分类号 |
G01N29/04;G01N29/28 |
主分类号 |
G01N29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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