发明名称 |
MEMS integrated circuit comprising microfluidic diaphragm valve |
摘要 |
A MEMS integrated circuit comprising one or more microfluidic diaphragm valves and control circuitry for the valves. Each valve comprises: an inlet port; an outlet port; a weir positioned between the inlet and outlet ports, the weir having a sealing surface; a diaphragm membrane for sealing engagement with the sealing surface; and a thermal bend actuator for moving the diaphragm membrane between a closed position in which the membrane is sealingly engaged with the sealing surface and an open position in which the membrane is disengaged from the sealing surface. The control circuitry is configured to control actuation of the actuator so as to control opening and closing of the valve. |
申请公布号 |
US8062612(B2) |
申请公布日期 |
2011.11.22 |
申请号 |
US20080142789 |
申请日期 |
2008.06.20 |
申请人 |
MCAVOY GREGORY JOHN;KERR EMMA ROSE;SILVERBROOK KIA;SILVERBROOK RESEARCH PTY LTD |
发明人 |
MCAVOY GREGORY JOHN;KERR EMMA ROSE;SILVERBROOK KIA |
分类号 |
F16K7/16 |
主分类号 |
F16K7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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