MICOR ELECTRON-BEAM DEVICE HAVING UNIT EMITTING SQUARE ELECTRON-BEAM

摘要

PURPOSE: A miniature electron beam device equipped with a square shape electron beam emission unit is provided to rapidly process a side which is wider than a gaussian round beam by applying a one pass process method. CONSTITUTION: A square shape electron beam emission unit comprises a sub-chamber(110), a electron beam source(121), and a beam shape deformable member(122). The sub-chamber maintains a vacuum condition for emitting an electron beam. The electron beam source is installed in the sub-chamber and emits the electronic beam. A main chamber(130) is installed in the bottom of the square shape electron beam emission unit. A working stage(140) is included inside the main chamber. The beam shape deformable member is one and more apertures which include a square hole.