STRUCTURE FOR ALLIGNING TIP OF ELECTRON BEAM AND LENS OR LENS AND LENS FOR ELECTRON BEAM DEVICE AND METHOD FOR ALLIGNING THE SAME

摘要

PURPOSE: The electronic beam tip and the lens of an electron beam emission apparatus and an array structure between a lens and a lens and an alignment method are provided to measure a parallel error using a camera, a cross shaped extension part, and an array dot. CONSTITUTION: An extension part(122,127) is horizontally extended from an electronic beam tip or each condenser lens group to the outside. The extension part is extended from the same spot on the plane of the electronic beam tip or each condenser lens group to the outside. A vision camera is placed in the vertical upper part of the electronic beam tip or the condenser lens group. The vision camera takes photographs of the extension part of the electronic beam tip and the condenser lens group or the condenser lens group and the extension part of the condenser lens group. A controller calculates a horizontal displacement amount which is separated from the alignment location by measuring the vector quantity of an array dot(123,128) in the extension part.