| 摘要 |
PURPOSE: A metal deposition apparatus is provided to reduce material costs required for carriers by using a mask for multiple deposition plates. CONSTITUTION: A metal deposition apparatus(100) comprises a deposition chamber(110), a leg(117), a drive unit(130), a through hole(114), an inlet(111), an outlet(113), a cathode(120), a mask(150), and an up-down unit(140). The deposition chamber is formed in a box shape. The leg supports the deposition chamber. The drive unit has rollers(135) for transferring deposition plates inside the deposition chamber. The through hole is formed in the top of the deposition chamber. The inlet is formed in one side of the deposition chamber, and the outlet is formed in the other side. The cathode is installed in the top of the deposition chamber through the through hole. The mask is loaded on the rollers and has perforated holes for accepting the deposition plates. The up-down unit vertically transfers the deposition plates.
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