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发明名称
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD.
摘要
申请公布号
NL2006573(A)
申请公布日期
2011.11.21
申请号
NL20112006573
申请日期
2011.04.08
申请人
ASML NETHERLANDS B.V.,
发明人
ONVLEE, JOHANNES;DEKKER, ALBERT;SPIERDIJK, JOHANNUS;MAN, HENDRIK
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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