| 发明名称 |
CYCLIC AMINO COMPOUNDS FOR LOW-K SILYLATION |
| 摘要 |
<p>Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.</p> |
| 申请公布号 |
KR20110125651(A) |
申请公布日期 |
2011.11.21 |
| 申请号 |
KR20117021122 |
申请日期 |
2010.03.10 |
| 申请人 |
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
MC ANDREW JAMES J. F.;ANDERSON CURTIS;DUSSARRAT CHRISTIAN |
| 分类号 |
C07F7/10;C23C16/30;H01B3/18 |
主分类号 |
C07F7/10 |
| 代理机构 |
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