摘要 |
FIELD: physics. ^ SUBSTANCE: liquid or gas pressure sensor has a detecting element which is a diaphragm, which is also a movable electrode which, with the insulator which separates it from the fixed electrode, forms a flat capacitor which is a pressure force levelling device. The flat capacitor is connected to a voltage source whose potential difference is used to compensate for diaphragm sagging. The pressure sensor is additionally fitted with an inductive displacement sensor and negative feedback loops, consisting of series-connected alternating current amplifier and an AC-DC voltage converter. The input of the amplifier is connected to the output of the inductive displacement sensor and the output of the AC-DC voltage converter is connected to the flat capacitor. ^ EFFECT: broader functionalities of the sensor. ^ 1 dwg |