| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor carrier lifetime measuring apparatus and a method therefor, by which a lifetime of carriers can be measured with good precision. <P>SOLUTION: A semiconductor carrier lifetime measuring apparatus Xa includes: a light-irradiation unit 1 for irradiating first and second different regions in a semiconductor as a measurement sample SW with first and second lights having different wavelengths; a measurement wave input/output unit 2 for irradiating the first and second regions with predetermined measurement waves respectively, and for using a first reflected or transmitted wave and a second reflected or transmitted wave with no changes to generate a difference-measurement wave which is a difference between the first reflected or transmitted wave of the measurement wave from the first region and the second reflected or transmitted wave of the measurement wave from the second region; a detection unit 3 for detecting the difference-measurement wave of the measurement wave input/output unit 2; and a calculation-control unit 4 for determining a carrier lifetime in the semiconductor of the measurement sample SW based on a result of detection by the detection unit 3. <P>COPYRIGHT: (C)2012,JPO&INPIT |
