COLOR FILTER SUBSTRATE INSPECTION METHOD AND INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for inspecting a foreign body attached on a substrate for a liquid crystal display apparatus in terms of its conductivity.

SOLUTION: In a method for inspecting to determine whether or not metal elements are contained in a foreign body attached to a substrate for a liquid crystal display apparatus, a comparison X-ray fluorescence spectrum of positions where no foreign body exists is performed beforehand once with respect to the predetermined number of the substrates to be inspected and an X-ray fluorescence spectrum of at least one position where a foreign body is attached to the substrate are measured. In this way, a plurality of X-ray fluorescence spectra are subject to data processing, thereby determining with high accuracy whether or not the foreign body contains metal elements.

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