| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a needle having a high degree of design freedom, a high bending strength, and an extremely high aspect ratio. <P>SOLUTION: A method of manufacturing a silicon nano-needle includes: a step of forming a lead protection film R1, which is a film for protecting a continuous region having a minimum width of 1 μm or more, in one or more areas of a principal surface 101 of a silicon substrate 100; a step of forming a straight cylindrical body 102 by etching a region exposed from the lead protection film R1 on the principle surface 101 of the silicon substrate 100 in a vertical direction; a step of thermally oxidizing the silicon substrate 100 until the maximum cross-sectional width of a right cylindrical body region 104 remaining unoxidized in the right cylindrical body 102 becomes less than 1 μm; and a step of forming a needle 10 made of silicon and having a lead, which is composed of the right cylindrical body region 104, and a mount 105, which has a side surface composed of a flare surface spreading toward the bottom and from the top of which the lead 104 protrudes, by removing an oxidized film 103 formed on the silicon substrate 100. <P>COPYRIGHT: (C)2012,JPO&INPIT |
