| 摘要 |
<P>PROBLEM TO BE SOLVED: To relax a pressure variation in a hermetically sealed chamber (pass box 4). <P>SOLUTION: The hermetically sealed chamber 4 is connected to an intake passage 12 for supplying air from an external environment through an aseptic filter 14, and to an exhaust passage 20 for discharging a gas through an aseptic filter 22, and includes an intake valve 18 and an exhaust valve 26 for selectively opening and closing the intake passage 12 and the exhaust passage 20, respectively. The apparatus also includes a control means 46 for controlling the inlet valve 18 and the exhaust valve 26 to keep the internal pressure of the hermetically sealed chamber 4 at a prescribed positive pressure level. Furthermore, a silicon membrane 48, which is expanded or retracted depending on a change in the internal pressure of the hermetically sealed chamber 4 to relax the pressure change, is connected to the exhaust passage 20 between the aseptic filter 22 and the exhaust valve 26. <P>COPYRIGHT: (C)2012,JPO&INPIT |
