| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a calculation method of the lead structure at the surface roughness of a fabricated article which is at least partly cylindrical. <P>SOLUTION: In the calculation method of the lead structure at the surface roughness of a fabricated article which is at least partly cylindrical, of the present invention, multiple stylus cross-sectionings which extend in the axis direction of the fabricated article and mutually separated in the circumferential direction are performed on a surface region of the target fabricated article, and in this case, at least one parameter of the lead structure is calculated based on the measurement value obtained by the stylus cross-sectionings. According to the present invention, an estimate value of at least one parameter of the lead structure is calculated based on a measurement value belonging to a first stylus cross-sectioning, and the estimate value is corrected based on a measurement value belonging to at least one second stylus cross-sectioning. <P>COPYRIGHT: (C)2012,JPO&INPIT |
