| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an infrared-ray imaging apparatus that can suppress image deterioration by blocking disturbance infrared-ray more appropriately. <P>SOLUTION: A surface of a semiconductor substrate 1 is provided with a blocking film 7 and a reflection film 8 in a plane form so as to cover an opening of a cavity part 1a. That is, the blocking film 7 is mechanically and thermally connected to a plane of the semiconductor substrate 1 that faces an optical system 150. The reflection film 8 is formed so as to cover the entire surface of the blocking film 7. An imaging pixel opening 101a is formed through the blocking film 7 and the reflection film 8. The blocking film 7 and the reflection film 8 let only an optical system passing infrared-ray 152 go through the imaging pixel opening 101a to a temperature detecting part 5 in the cavity part 1a. At places other than the imaging pixel opening 101a in the entire plane, the blocking film 7 and the reflection film 8 block/reflect the disturbance infrared-ray. <P>COPYRIGHT: (C)2012,JPO&INPIT |
