| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape measurement device which reduces the measurement error of three dimensional shape caused by vibration. <P>SOLUTION: The shape measurement device includes: a probe which lights and images an object to be measured; a linear motor 17 which relatively displaces the probe and the object to be measured; a shape operation part 34 which measures the shape of the object to be measured based on the state of lighting and that of imaging; a deflection detection part 28 which detects the deflection of the probe; and a control part 30 which controls measurement based on the deflection detected by the deflection detection part 28. <P>COPYRIGHT: (C)2012,JPO&INPIT |
