TERAHERTZ WAVE DETECTOR, AND PROCESS FOR PRODUCTION THEREOF

摘要

A terahertz wave detector (1) comprising: a substrate (3) and a substrate (4) which are joined to each other so as to form an internal space (2); an antenna main body (11) which is formed on the substrate (3) and can receive a terahertz wave and convert the terahertz wave into an electric current; an insulating film (12) which is supported on the substrate (4) through an air gap in the internal space (2); a resistive film (13) which is formed on one surface (12a) of the insulating film (12) and can generate heat corresponding to the electric current that has been converted by the antenna main body (11); a bolometer film (14) which is formed on the other surface (12b) of the insulating film (12) and of which the electric resistivity can vary in accordance with the heat generated in the resistive film (13); an antenna wiring line (15) which is formed on the substrate (4) and is electrically connected to the antenna main body (11) and the resistive film (13) for the purpose of supplying an electric current from the antenna main body (11) to the resistive film (13); and a bolometer wiring line (16) which is formed on the substrate (4) and is electrically connected to the bolometer film (14) for the purpose of obtaining a signal corresponding to the electric resistivity.