RESONATOR USING CARBON BASED NANO MATERIAL AND FABRICATION METHOD THEREOF

摘要

PURPOSE: A resonator which uses carbon based nano materials and a manufacturing method thereof are provided to include a silicon carbide layer and a carbon based nano material layer, thereby reducing energy loss with high rigidity compared to density. CONSTITUTION: A sacrificial layer(120) is arranged on a substrate(110). A resonance structure(130) is arranged on the sacrificial layer. The sacrificial layer supports both sides of the resonance structure of a dual fixing beam type. The resonance structure comprises a carbon based nano material layer(132) and a silicon carbide layer(131). The carbon based nano material layer includes one of materials among graphene, graphite, and CNT(Carbon Nano Tube).