发明名称 Method for manufacturing electrical sensing unit for sensing moisture, involves forming electrical sensor structure in metal layer of sensor portion by partial removal of metal film from sensor portion
摘要 <p>#CMT# #/CMT# An electrical isolating polymer-containing mold element (2) with a sensor portion (3) and a base portion (4) is formed by injection molding process. The thickness of sensor portion is set to 0.4 mm. The sensor and base portions of mold element are coated with the metal film of nickel or molybdenum, such that metal film formed in sensor portion is located directly on mold element. An electrical sensor structure (5) is formed in metal film of sensor portion by partial removal of metal film from sensor portion. A gold film is coated on metal film, after forming sensor structure. #CMT# : #/CMT# An independent claim is included for electrical sensing unit. #CMT#USE : #/CMT# Method for manufacturing electrical sensing unit (claimed) for sensing moisture in various environments. #CMT#ADVANTAGE : #/CMT# The electrical sensing unit with improved electrical characteristics and enhanced thermal measurement sensitivity is manufactured efficiently at low cost and with less labor, by performing less number of manufacturing steps. The current flow between sensor and base portions is enabled efficiently by use of metal film without need for expensive supplementary bonding. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a top view of the electrical sensing unit. 1 : Electrical sensing unit 2 : Electrical isolating polymer-containing mold element 3 : Sensor portion 4 : Base portion 5 : Electrical sensor structure.</p>
申请公布号 DE102010020190(A1) 申请公布日期 2011.11.17
申请号 DE20101020190 申请日期 2010.05.11
申请人 SENDSOR GMBH 发明人
分类号 G01D21/00;G01F1/692;G01K7/16 主分类号 G01D21/00
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