| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a standard sample for calibration which indicates that an electron beam-excited emission detector for the vacuum ultraviolet region is normal and serves as a standard in quantitatively comparing emission intensities of samples or quantifying an element contributing to the emission. <P>SOLUTION: In a method for quantitatively measuring an electron beam-excited vacuum ultraviolet emission intensity, the standard sample for the calibration of an electron beam-excited vacuum ultraviolet emission spectrometer comprising oxide crystals having a band gap energy of 6.2 eV or greater, measurement sample and the electron excited vacuum ultraviolet emission intensities of the measurement sample and the standard sample for calibration are measured under the same measurement conditions, and the emission intensity ratio of the measurement sample to the standard sample for calibration (the emission intensity of the measurement sample/the emission intensity of the standard sample for calibration) is obtained. <P>COPYRIGHT: (C)2012,JPO&INPIT |
