| 发明名称 |
RESONATOR USING CARBON NANO SUBSTANCE AND METHOD OF MANUFACTURING RESONATOR |
| 摘要 |
A resonator and a method of manufacturing a resonator are provided. The resonator includes a sacrificial layer formed on a substrate, and a resonant structure formed on the sacrificial layer, the resonant structure comprising a carbon nano-substance layer and a silicon carbide layer. |
| 申请公布号 |
US2011279188(A1) |
申请公布日期 |
2011.11.17 |
| 申请号 |
US201113105070 |
申请日期 |
2011.05.11 |
| 申请人 |
SHIN JEA SHIK;JUN SEONG CHAN;PARK YUN KWON;SONG IN SANG;KIM YOUNG IL;KIM DUCK HWAN;KIM CHUL SOO;INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SHIN JEA SHIK;JUN SEONG CHAN;PARK YUN KWON;SONG IN SANG;KIM YOUNG IL;KIM DUCK HWAN;KIM CHUL SOO |
| 分类号 |
H03B5/30;B05D5/12;B82Y40/00 |
主分类号 |
H03B5/30 |
| 代理机构 |
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