| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an SEM imaging method applicable to uses about samples comprising unknown composition/geometry. <P>SOLUTION: A method of investigating a sample using SEM comprises the step of irradiating a surface of the sample with a probing electron beam in a plurality (N) of measurements, in which each measurement has a value of a beam parameter (P), the value is chosen from the values within a certain range and differs for each measurement, stimulated radiation emitted by the sample during each measurement is detected, the stimulated radiation and a measurand (M) are associated with each other and recorded to compile a data set comprising a plurality of data pairs (P<SB POS="POST">i</SB>, M<SB POS="POST">i</SB>) (1≥i≥N). A statistical blind signal source separation technique is employed to automatically process a data set (D) and resolve it into a set (R) obtained as a result comprising a plurality of imaging pairs (Q<SB POS="POST">k</SB>, L<SB POS="POST">k</SB>). An imaging quantity (Q) having the value Q<SB POS="POST">k</SB>is associated with a discrete depth level L<SB POS="POST">k</SB>referenced to the surface S. <P>COPYRIGHT: (C)2012,JPO&INPIT |
