| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection device capable of reducing an installation area. <P>SOLUTION: An inspection device 1 includes a principal axis 4 extending in the direction intersecting with the direction perpendicular to an installation surface. When the principal axis 4 rotates around an axis line, an extension body 10 which extends from the principal axis 4 in a direction intersecting with the axial direction of the principal axis 4 also rotates. On the extension body 10, a chip holder 20 which holds an inspection chip 40 at a position separated from the principal axis 4 is installed. Rotation of the principal axis 4 gives the inspection chip 40 a centrifugal force acting in a direction perpendicular to the principal axis 4. <P>COPYRIGHT: (C)2012,JPO&INPIT |
