发明名称 Semiconductor Structures Using Replacement Gate and Methods of Manufacture
摘要 An improved semiconductor device manufactured using, for example, replacement gate technologies. The method includes forming a dummy gate structure having a gate stack and spacers. The method further includes forming a dielectric material adjacent to the dummy gate structure. The method further includes removing the spacers to form gaps, and implanting a halo extension through the gaps and into an underlying diffusion region.
申请公布号 US2011281409(A1) 申请公布日期 2011.11.17
申请号 US20100778319 申请日期 2010.05.12
申请人 ELLIS-MONAGHAN JOHN J.;GAMBINO JEFFREY P.;PETERSON KIRK D.;RANKIN JED H.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ELLIS-MONAGHAN JOHN J.;GAMBINO JEFFREY P.;PETERSON KIRK D.;RANKIN JED H.
分类号 H01L21/8238;H01L21/336;H01L29/78 主分类号 H01L21/8238
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