SUBSTRATE POSITIONING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE POSITIONING METHOD, AND COMPUTER READABLE MEDIUM HAVING A PROGRAM STORED THEREON

摘要

Disclosed is a substrate positioning apparatus capable of accurately performing positioning of a center of a circular-shape substrate with respect to a rotating shaft. The substrate positioning apparatus includes: a substrate disposing part; a first positioning mechanism including a first reference part contacting a side of the substrate; a second positioning mechanism including a second reference part contacting the side of the substrate; a first driver configured to drive the first positioning mechanism; a controller configured to control the drive of the first positioning mechanism. In particular, the second reference part contacts the substrate at a contact part and includes an elastic part that applies force in a moving direction of the first driver to the contact part and a detector that detects position information of the second positioning mechanism.