| 摘要 |
An apparatus having a roughness sensing system and a roughness measurement sensor, wherein a slide element and a probe tip come to operation, and method of use thereof. The slide element is arranged on an extreme end of a probe pin in the form of a scan-slide element. The probe tip is integrated into the probe pin, and the distance between the scan-slide element and the probe tip is predetermined. The roughness sensing system is a 1D-, 2D- or 3D-scanning system having a parallelogram configuration. The apparatus further has a serving device which enables moving the probe pin together with the scan-slide element and the probe tip jointly over a surface to be scanned. |
