| 发明名称 |
ILLUMINATION SUBSYSTEMS OF A METROLOGY SYSTEM, METROLOGY SYSTEMS, AND METHODS FOR ILLUMINATING A SPECIMEN FOR METROLOGY MEASUREMENTS |
| 摘要 |
Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements are provided. |
| 申请公布号 |
US2011279819(A1) |
申请公布日期 |
2011.11.17 |
| 申请号 |
US200913061936 |
申请日期 |
2009.09.29 |
| 申请人 |
CHUANG YUNG-HO (ALEX);LEVINSKI VLADIMIR;LIU XUEFENG;KLA-TENCOR CORPORATION |
发明人 |
CHUANG YUNG-HO (ALEX);LEVINSKI VLADIMIR;LIU XUEFENG |
| 分类号 |
G02F1/03;G01B11/00 |
主分类号 |
G02F1/03 |
| 代理机构 |
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代理人 |
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| 主权项 |
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