| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a down-sized optical waveguide type sensor having high detection sensitivity and a method of manufacturing the optical waveguide type sensor. <P>SOLUTION: The optical waveguide type sensor has an optical waveguide formed on a substrate. The optical waveguide includes: a core spirally extended on one surface of the substrate; a lateral clad formed in the same layer as the core on one surface of the substrate in contact with both side surfaces of the core so as to sandwich the core. At least a part of an upper surface out of the upper surface and a lower surface of the core is used as a propagation surface on which light oozes out and is absorbed into the object to be detected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
