ETCHING ACID WASTE LIQUID DISPOSAL SYSTEM, ETCHING ACID WASTE LIQUID DISPOSAL APPARATUS AND ETCHING ACID WASTE LIQUID DISPOSAL METHOD APPLIED TO THE SYSTEM AND THE APPARATUS

摘要

PURPOSE: An etching acid waste liquid disposal system, an etching acid waste liquid disposal apparatus, and an etching acid disposal method are provided to reduce the waste of etching acid by circulating and reusing the etching acid waste liquid without the mixture of another waste liquid. CONSTITUTION: A filter(2) removes solid materials. An ion exchange resin tower(3) remove positive metal ions. The filter and the ion exchange resin tower are connected by an etching acid waste liquid disposal circulation path(5). The etching acid waste liquid disposal circulation path includes an inlet(6) to which the etching acid waste liquid is inputted. The filter is connected to a pump(7) and a flow meter(8) by the etching acid waste liquid circulation path.