| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser processing method for a plate-like object in which a laser beam machined groove can be formed without generating cracks in coat and a substrate, when the coat is removed by irradiating laser beams onto the coat formed by being laminated on the surface of the substrate along a planned dividing line and forming the laser beam machined groove along the planned dividing line. <P>SOLUTION: In the laser processing method for the plate-like object, the plate-like object formed by laminating the coat on the surface of the substrate is held on a chuck table, and the coat is removed along a predetermined planned dividing line by irradiating the laser beams along the planned dividing line to form the laser beam machined groove. Before irradiating the laser beams to the plate-like object along the predetermined planed dividing line, the plate-like object is heated to a predetermined temperature along the planned dividing line irradiated by the laser beams. <P>COPYRIGHT: (C)2012,JPO&INPIT |
