| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a generated gas analyzig apparatus which further increases analysis precision of a gas generated by heating. <P>SOLUTION: The generated gas analyzig apparatus 10 includes: a cylindrical sample cell 20 having a first orifice 22 provided in a tapered tip side thereof and a gas supply pipe 26 connected to the other side thereof; and a cylindrical skimmer section 51 having a second orifice 52 provided in a tapered tip side thereof and a quadrupole mass spectrometer 62 arranged the other side thereof, and has the sample cell 20 and the skimmer section 51 arranged therein in a state of being opposed to each other in the orifice side and being contained in a decompression chamber 30. The decompression chamber 30 is decompressed by a diffusion pump 33 and a rotary pump 34. The sample cell 20 is detachably arranged by using a highly heat-resistant material (alumina or the like), and a sample is arranged by inserting a sample holder 23 into the sample cell 20 from a connecting pipe 24 side. The generated gas analyzig apparatus 10 can transfer a sample gas existing between both of the orifices opposed to each other by decompressing the decompression chamber 30, in a molecular flow region, and can suppress unnecessary diffusion of the sample gas. <P>COPYRIGHT: (C)2012,JPO&INPIT |
