| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a Raman spectroscopy which is simpler than the conventional art in order to make it possible to suppress signal noise and to analyze with high sensitivity the structure of the surface portion of a thin structure or solid object formed on a substrate. <P>SOLUTION: In a surface enhanced Raman spectroscopy, metal particle having surface enhanced Raman scattering activity is laminated on a thin film made from a substance having Raman activity formed on a substrate or on the surface of a solid substance having Raman activity by using a physical vapor phase growth method or liquid phase growth method. Then, the surface portion of the thin film or the solid substance and the metal particle are irradiated with excitation light, thereby performing spectroanalysis of the Raman scattering light enhanced by metal originated from the structure of the surface portion of the thin film or the solid substance. <P>COPYRIGHT: (C)2012,JPO&INPIT |
