| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve durability and reliability by preventing a cleaning liquid from spreading over a revolving motor. <P>SOLUTION: A cleaning apparatus includes a turret head 4 rotatably pivoted to a center post 22 fixed to a quill 21, a cleaning-liquid feed passage 14 feeding a cleaning liquid to a cleaning tool T, a spindle driving device 5 rotating the cleaning tool T, and a turret driving device 6 revolving the turret head 4. The spindle driving device 5 includes a spindle pinion 53 inserted into a spindle driving shaft 52 connected with a spindle motor 51 arranged outside a cleaning chamber, the turret driving device 6 includes a revolving pinion 63 inserted into a revolving driving shaft 62 connected with a turret revolving motor 61 arranged outside the cleaning chamber, and the spindle driving shaft 52 and the revolving driving shaft 62 are arranged to be parallel. The spindle pinion 53 is meshed with an external gear 54a and the revolving pinion 63 is meshed with an internal gear 64a. <P>COPYRIGHT: (C)2012,JPO&INPIT |
