| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape measurement device which reduces the measurement error of three dimensional shape caused by vibration. <P>SOLUTION: The shape measurement device includes: a probe 20 which lights an object to be measured with a line light and images the object to be measured; a linear motor which relatively displaces the probe 20 and the object to be measured; a shape operation part which measures the shape of the object to be measured based on the state of lighting and that of imaging; a deflection detection part which detects the deflection of the probe; and correction mechanisms 60, 80, 90 which correct a lighted position based on the deflection detected by the deflection detection part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
