MATERIAL-WORKING DEVICE WITH IN-SITU MEASUREMENT OF THE WORKING DISTANCE

摘要

The invention relates to a material-working device (1) with working beams (4) of a beam generator (5) and with in-situ measurement of the working distance (a) between the beam generator (5) and the workpiece (6). The material-working device (1) has for this purpose a working laser (13) with working beams (4). A laser scanner (14) comprising a two-dimensional deflecting device with scanner mirrors (31, 32) is arranged downstream of a working laser (13). An automatic refocusing device for varying working distances (a(t)) is provided. A sensor device (16) comprising a spectrometer (17) and at least two sensor light sources generates measuring beams (18), which by means of the laser scanner (14) and a lens system (19) jointly sense the working area (20) of the workpiece (6) while recording the workpiece distance (a). The measuring beams (18) of the sensor light sources (11, 12) are linearly polarized and are coupled by means of an optical coupling element (21) into the path of the working beam (25) of the laser scanner (14) of the material-working device (1) with crossed directions of polarization and in a collimated state.