METHOD FOR PRODUCING INFRARED-PHOTOSENSITIVE MATRIX CELLS ADHERING TO AN OPTICALLY TRANSPARENT SUBSTRATE BY MOLECULAR ADHESION, AND RELATED SENSOR

摘要

The invention relates to a method for producing an infrared radiation sensor, said sensor comprising an infrared photodiode array formed in a first material and a reading circuit formed in a second material, said method comprising the steps of: sticking, through molecular adhesion, a first material side surface (1) onto an optically transparent crystalline material side surface (5) having infrared radiation and a coefficient of thermal expansion similar to that of the second material, give or take 20%; thinning the body of the first material side surface so that the latter is less than 25 µm; producing infrared-sensitive photodiodes (9) onto the thus-thinned first material side surface; depositing contact ball bearings (11) onto the infrared photodiodes; and mounting the reading circuit (13) onto the first material side surface through flip chip technology.