APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To stably deliver a thin paper-like processing target such as a semiconductor wafer or the like by using a robot hand.

SOLUTION: An apparatus 1 for manufacturing a semiconductor device has an accommodating unit 2 for accommodating a processing target W, and a feeding unit 3 which has a hand 3a for supporting the processing target W and feeds the processing target W accommodated in the accommodating unit 2 by the hand 3a. The accommodating unit 2 has a support plate having plural support portions for supporting the processing target W arranged in a comb-shape, and the hand 3a has plural support portions for supporting the processing target W. The support portions of the hand 3a are arranged in such a comb-shape as to intrude into the gaps between the respective support portions of the support plate.

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