| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow measurement even in the case that the center of gravity of a material is deviated from a center of a flat spring for detection or the flat spring is deformed. <P>SOLUTION: A scanning probe microscope S1 includes: a flat spring 3 having a first sample 1 installed at a front end thereof; a fixing member 14 which fixes a base end of the flat spring 3; a stage 15 which has a second sample 2 fixed thereon; an optical system 18 for detecting displacement of the flat spring 3, which detects reflected light of detecting light radiated from a light source 16 to the flat spring 3, by a photodetector 17; a sample interval adjustment mechanism 19 which moves the stage 15 or the flat spring 3 to bring the first and second samples 1 and 2 close to or away from each other; a horizontal scanning mechanism 20 which measures friction between the first and second samples 1 and 2; and a vertical scanning mechanism 21 which measures at least one of adsorption, agglutination, and reaction between the first and second samples 1 and 2. The scanning probe microscope S1 includes a rotating mechanism 22 for rotating the fixing member 14 which changes inclination of the flat spring 3 with which an optical axis of detecting light r11 is aligned, at an arbitrary angle with respect to the stage 15. <P>COPYRIGHT: (C)2012,JPO&INPIT |
