| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stamper excellent in releasability and durability. <P>SOLUTION: In a method of forming the stamper, a substrate, a conductive underlayer having catalytic activity and projecting patterns having no catalytic activity are sequentially formed. Stamper projections are formed by depositing an amorphous conductive layer between the projecting patterns and in a region in which the conductive underlayer is exposed by electroless plating using a master having a region in which the conductive underlayer having catalytic activity is exposed. Electroplating is performed on the stamper projections comprising projecting patterns and the amorphous conductive layer by using the amorphous conductive layer and the conductive underlayer as electrodes to form a stamper body formed of a crystalline metal. In the stamper forming method, the stamper having the stamper projections and the stamper body is released from the master. <P>COPYRIGHT: (C)2012,JPO&INPIT |
