| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat treatment furnace capable of suppressing deviation of a distribution amount of coolant gas to a heat insulating chamber. <P>SOLUTION: The disclosed vacuum heat-treatment furnace 1, which is provided with an airflow-direction adjustment plate 50 that is provided at a prescribed angle in a manner so as to lead coolant gas circulating within the furnace into an insulated vessel 10 in which an object W to be processed is disposed, has a displacement driving device 60 that drives the displacement of the angle of the airflow-direction adjustment plate 50 on the basis of at least one value of the flow speed and the density of the coolant gas. <P>COPYRIGHT: (C)2012,JPO&INPIT |
