发明名称 HYDROGEN SENSOR
摘要 A hydrogen sensor comprises a housing (10), which is closed off by a membrane (14) that is made of palladium and selectively only pervious to hydrogen. The housing is evacuated and contains a Pirani pressure sensor (22). The membrane (14) and the Pirani pressure sensor (22) are each attached to a carrier (11, 12). Both carriers are joined directly next to one another or kept at a distance by a connection piece (25). The hydrogen sensor has a high sensitivity and a low response time due to the relatively large membrane surface and the low housing volume. It can be produced in a small size and integrated in the handle of a sniffer-type leak indicator.
申请公布号 WO2010149519(A3) 申请公布日期 2011.11.17
申请号 WO2010EP58308 申请日期 2010.06.14
申请人 INFICON GMBH;WETZIG, DANIEL 发明人 WETZIG, DANIEL
分类号 G01N7/10 主分类号 G01N7/10
代理机构 代理人
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