ACCELEROMETER

摘要

An accelerometer 100 can include a support structure 104 having situated thereupon a stator electrode array 106 including multiple stator electrodes 110 (e.g., A, B, and C); and a proof mass 102 positioned parallel to the stator electrode array and capable of displacement parallel thereto. A translator electrode array 108 facing the stator electrode array can comprise multiple translator electrodes 112 (e.g., a and b) can be situated on the proof mass. Further included is a drive circuitry 114 to apply drive voltages to six capacitances formed by the stator and translator electrodes. The total force exerted on the proof mass by the drive voltages is held constant at about zero.