| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transparent conducive film and a method of manufacturing the same of which a microstructure of a surface texture is precisely controlled so as to achieve high light scattering power and suppress a temperature in manufacturing processes. <P>SOLUTION: The zinc oxide transparent conductive film contains Ti and Al at an atomic ratio of 0.001≤Ti/(Zn+Al+Ti)≤0.079, 0.001≤Al/(Zn+Al+Ti)≤0.079, and in addition, 0.01≤(Ti+Al)/(Zn+Al+Ti)≤0.08 by surface-treating a heated substrate by sputtering using a zinc oxide target. The zinc oxide transparent conductive film has center line average surface roughness of 30-200 nm, has concave lens-shaped textures of different sizes on its surface, and an average value of widths of the textures is between 100 nm and 10 μm. The transparent conductive film is used for an electronic element, optical element, or a solar cell. <P>COPYRIGHT: (C)2012,JPO&INPIT |
