发明名称 |
RADIATION DETECTOR AND FABRICATION PROCESS |
摘要 |
A monolithic integrated radiation detector includes a photodetector and a scintillator deposited directly on the photodetector. Preferably the photodetector is silicon and the scintillator is a rare earth phosphor. The rare earth phosphor is crystal lattice matched to the silicon by a transitional layer epitaxially grown therebetween. |
申请公布号 |
US2011278464(A1) |
申请公布日期 |
2011.11.17 |
申请号 |
US20100779355 |
申请日期 |
2010.05.13 |
申请人 |
CLARK ANDREW;WILLIAMS DAVID L. |
发明人 |
CLARK ANDREW;WILLIAMS DAVID L. |
分类号 |
G01T1/20;G01T1/208;H01L21/30 |
主分类号 |
G01T1/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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