发明名称 |
TEMPERATURE CONTROLLER, FLUID CIRCULATOR AND TEMPERATURE CONTROL METHOD USING TEMPERATURE CONTROLLER |
摘要 |
A temperature controller includes: a closed first circulation circuit having a fluid cooler; a closed second circulation circuit having a halogen lamp heater as a fluid heater and feeding a thermal fluid heated by the halogen lamp heater to a vacuum chamber as an object to be temperature-controlled; a feed path that feeds the thermal fluid from the first circulation circuit to the second circulation circuit; and a discharge path that discharges the thermal fluid from the second circulation circuit and returns the thermal fluid to the first circulation circuit. A flow-rate control valve that adjusts and controls a feed flow-rate of the thermal fluid from the first circulation circuit is provided in the feed path. A pressure control valve that compensates a pressure of the thermal fluid at a predetermined pressure level or less is provided in the discharge path. |
申请公布号 |
US2011277983(A1) |
申请公布日期 |
2011.11.17 |
申请号 |
US201113106020 |
申请日期 |
2011.05.12 |
申请人 |
TAKAHASHI NORIO;KELK LTD. |
发明人 |
TAKAHASHI NORIO |
分类号 |
F28F27/00;F15D1/00;F28D15/00 |
主分类号 |
F28F27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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